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XLH, valvola ad angolo manuale vuoto elevato, tenuta a soffietto

XLH, valvola ad angolo manuale vuoto elevato, tenuta a soffietto

SMC

SMC

A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
[Features]
· Bellows type is particulate-free and cleaned.
· Low actuation torque (0.5 N·m or less).
· Spring provides a standard sealing load.
· Handle height remains the same regardless of whether valve is open or closed.
· Equipped as standard with an indicator for confirming if the valve is open or closed.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Nota

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

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Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series Specifications

XLH Series external appearance

XLH Series external appearance

Model XLH-16 XLH-25 XLH-40 XLH-50
Fluids Inert gas vacuum
Operating Temperature (°C) 5 to 150
Operating Pressure Pa (abs) 1 ×; 10-6 to atmospheric pressure
Conductance L/s Note 1: 5 14 45 80
Amount of leakage Pa·m3/s Internal For standard material (FKM): 1.3 ×; 10-10, values at normal temperature and excluding gas permeation
External For standard material (FKM): 1.3 ×; 10-11, values at normal temperature and excluding gas permeation
Flange Type KF (NW)
Main Material Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface Treatment External: hard anodized aluminum, Internal: base material
Actuation torque N·m 0.1 ≤ 0.15≦ 0.35≦ 0.5≦
Handle revolutions 5 7 10 13
Weight (kg) 0.23 0.41 1.05 1.62

Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.

Product Drawing

 

(Unit: mm)

 

XLH Series dimensional drawing

XLH Series dimensional drawing

Model A B C D E Note 1: F G H
XLH-16 40 100.5 38 1 - 30 17 35
XLH-25 50 114 48 1 12 40 26 41
XLH-40 65 162.5 66 2 11 55 41 57
XLH-50 70 179.5 79 2 11 75 52 70

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.

Product Diagram

XLH Series diagram

XLH Series diagram

*Refer to the manufacturer's catalog for maintenance parts.

Product Working Principle

The valve opens by rotating the handle to the left. The handle does not move up and down. The indicator shows whether or not the valve is open or closed.
As the the handle turns to the right, the valve begins to close. The valve will be sealed when you no longer feel the turning force. The sealing force for the valve is provided by spring and is constant.

Product Options Descriptions

  • Heater
    Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting.
  • Indicator
    When the valve is open, an orange mark appears towards the center of the name plate.

Notes

  • *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *When using with heaters (thermistors), install a device for preventing overheating.
  • *Use within the operating pressure range.
  • *For gases which cause a large amount of deposits, either heat the valve body or use the type with a heater to prevent deposits in the valve.
  • *Refer to the manufacturer's catalog for parts other than those detailed above.
Numero di dati da visualizzare
30
45
60
  1. 1
Codice componente
XLH-16
XLH-25
XLH-25-XN1A
Codice componente
Prezzo unitario standard
Quantità minima d'ordineSconto volumi elevati
Giorni
spedizione standard
?
Ghiere con flangia Conduttanza sonica Materiale guarnizione Perdita
(Pa·m3/s) 		Modifica posizione guarnizione

440.59 €

1 4 giorni 165L/SFKM 1349-80Interno: 1.3 × 10-10, esterno: 1.3 × 10-11Assente

458.96 €

1 4 giorni 2514L/SFKM 1349-80Interno: 1.3 × 10-10, esterno: 1.3 × 10-11Assente

460.73 €

1 26 giorni 2514L/SEPDM 2101-80Interno: 1,3 × 10-8, Esterno: 1,3 × 10-9Guarnizione valvola/guarnizione esterna

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  1. 1
 

Informazioni di base

Tipo Valvola per vuoto manuale Applicazione Funzionamento a elemento singolo Metodo di installazione Diretto
N. di raccordi Valvola a 2 porte A commutazione 2 posizioni, normalmente chiuso Tipo di attacco tubo Flangia
Con flangia KF Con tenuta Guarnizione a soffietto Trattamento superficie corpo Esterno: alluminio anodizzato rigido, interno: materiale base
Riscaldatore sì/no Assente

Configura

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Proprietà di base

  • Ghiere con flangia

    • 16
    • 25

    Ripristina

  • Conduttanza sonica

    • 5L/S
    • 14L/S

    Ripristina

  • Materiale guarnizione

    • FKM 1349-80
    • EPDM 2101-80

    Ripristina

  • Perdita(Pa·m3/s)

    • Interno: 1,3 × 10-8, Esterno: 1,3 × 10-9
    • Interno: 1.3 × 10-10, esterno: 1.3 × 10-11

    Ripristina

  • Modifica posizione guarnizione

    • Assente
    • Guarnizione valvola/guarnizione esterna

    Ripristina

  • Tipo

    • XLH

    Ripristina

  • Filtrare per tipo dati CAD

    • 2D
    • 3D

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    • Tutti gli articoli
    • 4 giorni o meno
    • 26 giorni o meno

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